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Jul/Aug 2009 Process Cleaning Magazine CO2 For Complex Cleaning


Precision cleaning requires technology that provides improved performance, productivity, environmental
quality and economics, all while adapting to rapidly
evolving device manufacturing technology. In response to these new pressures, solvent-based cleaning processes have re-emerged to prevent
malfunctions in high-reliability or high-power applications, necessitating a green process solution. A precision cleaning technology called centrifugal CO2 cleaning combines unique centrifugal dry washing and rinsing processes using specially formulated high-boiling solvents such as citrus terpenes and paraffins with recycled carbon dioxide in a tunable cleaning solvent system.